About Our ResearchThe Division performs research into new and improved measurements, standards and instrumentation for electron beam microanalysis. Special emphasis is placed on research and development to improve:
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About
Electron Beam Methods
Electrons can be focused with magnetic fields to form small probes. These electron probes can be directed at specimens where they scatter either elastically or inelastically. Elastic scattering in the form of electron diffraction can be used to determine the crystal structure, orientation, and phase identification of a specimen. Inelastic scattering in the form of ionization of electrons from the various shells of the Bohr atom leads to quantitative elemental and chemical information through several spectrometries: Electron Energy Loss (EELS), X-ray (Energy or Wavelength Dispersive), and Auger. These spectrometries combined with electron imaging yield information from regions on a specimen of a few micrometers to less than a nanometer.
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Analytical Instrumentation ResourcesScanning Electron Microscopes & Microprobes: Analytical Electron Microscopes (AEM, TEM):
Auger Microprobes: Other Preparation Facilities Disclaimer |
Example Technical Activity Reports |
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Improving Quantitative Analysis: Analyzing the Tough Ones: Quantitative X-ray Microanalysis of Extreme Topography New Boron Substrates for Particle Microanalysis Improving Analytical Spatial Resolution Phase Identification from sub 200 nm particles by electron backscatter diffraction (EBSD) |
Improving Chemical Imaging at High Spatial Resolution Chemical Characterization of Magnetic Materials at High Spatial Resolution Solving tough, real-world analytical problems Analytical Electron Microscopy of Ultrathin Gate Dielectric Films on Silicon Characterization of the Morphology of Voids in Rutile Nanoparticles Fabrication and Electron Microprobe Characterization of Barium-Strontium-Titanate (BST) Films |
Last Updated
March 5, 2002
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Web Contact micro@nist.gov