X-ray Measurements

About Our Research

The division performs research into new and improved methods and instrumentation for x-ray beam microanalysis. Special emphasis is placed on research and development to improve:

Spatial resolution --this includes the depth, area, and/or volume of the quantitative elemental and chemical information from a bulk, thin film, or particle specimen. Developing and applying new x-ray optical approaches (polycapillary, multilayer mirrors, grazing incidence, etc.)

Standard data for XPS and other surface and microanalysis methods

Quantitative chemical analysis using x-ray beams.

Solving tough, real-world analytical problems with new or improved electron beam approaches.

Technical Contact: Eric B. Steel

Technical Activities Reports

Thickness Measurements of SEMATECH Gate Dielectrics by GIXPS

Effects of Elastic-Electron Scattering on Measurements of Silicon Dioxide Film Thicknesses by X-ray Photoelectron Spectroscopy

Role of uncertainties associated with fundamental parameters and surface/interface gradation in model Grazing Incidence X-ray Photoelectron Spectroscopy calculations

XPS Standard Data Related (see also Data Activities)

New Databases for Surface Analysis by Auger-Electron Spectroscopy and X-Ray Photoelectron Spectroscopy

Standard Test Data for Comparison of Curve-Fitting Approaches in Spectral Data Analysis

XRD Related

Phase Mapping of Plasma-Sprayed Yttria-Stabilized Zirconia

XRF Related

Capillary X-ray Microfluorescence Instrument

Analytical Instrumentation Resources

X-ray Photoelectron Spectroscopy (XPS)

Synchrotron Based Grazing Incidence XPS

X-ray Diffraction (XRD)

• Philips Automated Powder X-ray Diffractometers (three units)
• Rigaku Rotating Anode X-ray Source (18 kW) with Position Sensitive Microdiffractometer and Powder Diffractometer
• X-ray Optical Bench for fundamental focussing studies

X-ray Fluorescence

• MicroXRF Imaging and Analysis Bench

Disclaimer
Certain commercial equipment, and software, are identified in this documentation to describe the subject adequately. Such identification does not imply recommendation or endorsement by the NIST, nor does it imply that the equipment identified is necessarily the best available for the purpose.