The need for improved spatial resolution currently limits the ability of industry to answer key questions regarding the chemical composition of surfaces and interfaces. Needs range from improved chemical and structural diagnostics to phase identification and trace compositional analysis. In addition to meeting current industry needs in these areas, there is a continuing  demand for new measurement methods to be developed that will be positioned to meet emerging measurement challenges. NIST/CSTL develops measurement tools that enable chemical characterization of elements, isotopes, and molecules at millimeter to nanometer spatial scales with major, minor, and trace concentrations. These tools are developed such that the “microspatial” relationships can be correlated with specific macroscopic properties.

Recent Technical Activities Related to Nanotechnology

Electron Microscopy and Spectroscopy

• Identification from sub 200 nm particles by electron backscatter diffraction (EBSD) 
• Characterization of the Morphology of Voids in Rutile Nanoparticles
• Quantitative X-ray Microanalysis of Extreme Topography
• Primary Electron Beam Broadening in the Environmental Scanning Electron Microscope

Scanned Probe Microscopy and Spectroscopy

• Absorption Sensitivity and Spatial Resolution in Near-Field Infrared Spectroscopy
• Microwave Evanescent Probe Microscopy for Materials Analysis.
• Scanning Tunneling Microscope Spectroscopy of Atomically Engineered Surfaces: Kondo vs. Non-magnetic Systems.

Additional Activities

• Determination of the Absolute Molecular Orientational Distribution of the Polystyrene Surface
• Fundamental Studies of Mechanisms in Molecular SIMS Using Cluster Projectiles

Technical Contact: Greg Gillen