The ERC for Environmentally Benign Semiconductor Manufacturing, a joint ERC of the University of Arizona, Arizona State, UC, Berkeley, Cornell, MIT and Stanford, is jointly funded by NSF and the Semiconductor Research Corporation, maintains extensive facilities including semiconductor fabrication and nanofabrication facilities, plasma etchers and reactors, the Ultrapure Water Pilot Research Laboratory and the Advanced Electronic Packaging Facility. The overall investment value of these facilities is $20 million.