Research at the Center for Low Power Electronics at the University of Arizona and Arizona State University (EEC-9523338) has produced novel techniques for fabricating electromechanical devices on silicon for use in communication devices. The goal of this work is to fabricate reconfigurable microwave circuits using Micro Electro-Mechanical (MEMS) switches that can be monolithically integrated with the rest of the circuitry (including digital circuits and active devices). Such a system can lead to dynamically reconfigurable monolithic transceivers that reside on a single chip, which is capable of sensing, thinking, acting and communicating. It is capable of being tuned electronically over a wide frequency range and programmed for such a purpose. In other words, the digital part of a chip will be able to control the RF front end and alter its response. This capability will revolutionize the next generation of "smart chips" that will adapt their "behavior" according to information they receive from other chips or a control center. Reconfigurable low-cost wireless and satellite communication networks, seekers for smart weapons, and automobile and plane radar are a few of the most notable applications. This is a novel approach for reconfigurable microwave circuits. Issues such as interactions of the switches with the microwave circuits, low-voltage low-stress switch designs and minimization of losses with maximum operational bandwidth are addressed.