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AS researchers focus on ever-smaller dimensions to engineer advanced materials, they increasingly demand new tools to scrutinize these materials. The need is particularly acute for semiconductor chip makers as they continue to shrink the size of chips and their internal features. Lawrence Livermore researchers also want a better way to image and characterize the all-important surfaces of critical materials.
Now a team from Livermore's Physics and Space Technology, Chemistry and Materials Science, and Engineering directorates has developed a diagnostic instrument called a time-of-flight secondary ion mass spectrometry (SIMS) emission microscope. For the first time, the instrument simultaneously provides extremely sensitive surface analysis, high-resolution imaging, and chemical determination of surface constituents. Recent tests on a variety of materials show that the new microscope may well prove valuable in solving vexing surface analysis problems in fields as diverse as precision optics and amino acid sequencing.
SIMS is a widespread technique in which a stream of energetic, primary ions bombards the surface of a material under investigation. Upon impact, these ions generate positively and negatively charged secondary ions, which are gathered by electrically charged lenses, imaged, and identified. (Neutral atoms and molecules are also given off but are not detected.)
NASA scientists used the first SIMS instrument in the 1960s to analyze moon rocks. Today, SIMS is widely used for analyzing trace elements and contaminants in solid materials, especially semiconductors and thin films.
Traditional SIMS instruments employ a stream of single-charged primary ions (for example, xenon +1) to bombard a sample. With this technique, about a thousand bombardments are needed to produce one secondary ion, a slow process during which a spectrum of surface constituents is gradually built up.
Greater "Pop"
The new Livermore instrument uses not single-charged, but multiple-charged ions (for example, gold +69), which produce a thousandfold increase in secondary ions. "Highly charged ions make our instrument unique," says materials scientist Alex Hamza. "The higher the charge, the greater the 'pop,' the more ions that come off." More ions mean more--and faster--information about the composition of the surface layer, including any contaminants.
Hamza says studies at Livermore show that during the first few femtoseconds (quadrillionths of a second) of impact, the highly charged ions deposit a huge amount of potential energy into a surface area several nanometers (billionths of a meter) square. In contrast, single-charged ions deposit large amounts of kinetic, not potential, energy. This kinetic energy transfer is not localized at the surface but is distributed more deeply into the sample.
Although the exact mechanism of highly charged ion energy transfer isn't fully elucidated, Hamza says it is probable that electrons from nearby surface atoms are attracted to the strongly positive primary ion. The resulting electron transfer removes the "glue" that once held the nearby atoms in place, allowing them to fly off. As they leave the surface, they are attracted to the electrostatic lens of the microscope and accelerated to a detector located about a half meter from the sample. Finally, an image of the surface magnified at from 40 to 400 times is created (Figure 1). |