NSF LogoNSF Award Abstract - #0210559 AWSFL008-DS3

NIRT: Staggered Probes for Integrating Nano Machining and Metrology

NSF Org DMI
Latest Amendment Date July 9, 2004
Award Number 0210559
Award Instrument Continuing grant
Program Manager Kevin Lyons
DMI DIV OF DESIGN,MANUFAC & INDUSTRIAL INNOV
ENG DIRECTORATE FOR ENGINEERING
Start Date August 1, 2002
Expires July 31, 2006 (Estimated)
Expected Total Amount $1000000 (Estimated)
Investigator Robert R. Vallance (Principal Investigator current)
Kazi R. Javed (Co-Principal Investigator current)
Apparao M. Rao (Co-Principal Investigator current)
M. Pinar Menguc (Co-Principal Investigator current)
Sponsor U of Kentucky Res Fdn
109 Kinkead Hall
Lexington, KY 405060057 859/257-8311
NSF Program 1674 NANOSCALE: INTRDISCPL RESRCH T
Field Application 0308000 Industrial Technology
Program Reference Code 1788,9146,9150,MANU,

Abstract

This proposal was received in response to Nanoscale Science and Engineering Initiative, NSF 01-157, category NIRT. Our interdisciplinary team is investigating a new process for nanoscale machining employing field emission of electrons from carbon nanotubes. High-precision nanomachining will be obtained by the concentrated thermal power transmitted by electron beams to a thin-film workpiece. In order to investigate the nanomachining process, we will develop a staggered probe that integrates multiple carbon nanotubes on a single probe for integrated nanometrology by scanning probe microscopy and nanomachining by field emission. Such probes will enable the experimental demonstration and investigation of nanomachining with field emission from nanotubes.

This research will demonstrate a new high-precision manufacturing process for producing nano-scale patterns that will impact many disciplines such as nanoelectronics, nanoscience, biology, and energy. The research will foster a multi-university, interdisciplinary partnership in the areas of precision manufacturing, nanoscale thermal sciences, solid-state physics, and material science. A broad set of educational and outreach activities will include nanotechnology workshops chemistry and pre-engineering students at Kentucky State University (KSU) and a summer microscopy fellowship for KSU minority students at the University of Kentucky's microscopy facility.


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